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Surface nanopatterning of Si by ion beam irradiation with sub-sputter-threshold energy

J. Seo, H. Jeong, w. Kim, J. Muñoz-Garcia, M. Castro, R. Cuerno, J.-S. Kim

Physical Review B Vol. 112, nº. 16, pp. 165408

Summary:

We examine the formation of nanoscale patterns on silicon surfaces subjected to ion beam irradiation at energies below the sputtering threshold, which suppresses net erosion. Using Kr ions with well-defined energies, we provide solid evidence that mass redistribution alone can lead to surface instability and the formation of patterns. The experimentally observed ripple structures are well described by continuum models that describe similar pattern formation processes on the surfaces of Aeolian sand dunes. This suggests that ion winds are responsible for redistributing surface atoms, forming the observed ripple patterns.


Keywords: Growth processes, Irradiation effects, Nonequilibrium statistical mechanics, Chaos & nonlinear dynamics


JCR-JIF Impact Factor and WoS quartile: 3,900 - Q2 (2025)

DOI reference: DOI icon https://doi.org/10.1103/qkr5-2h54

Published on paper: October 2025.

Published on-line: October 2025.



Citation:
J. Seo, H. Jeong, w. Kim, J. Muñoz-Garcia, M. Castro, R. Cuerno, J.-S. Kim, "Surface nanopatterning of Si by ion beam irradiation with sub-sputter-threshold energy", Physical Review B, Vol. 112, nº. 16, pp. 165408, October 2025. [Online: October 2025] doi: 10.1103/qkr5-2h54

    Research groups:
  • Instituto de Investigación Tecnológica (IIT)
  • Dinámica No Lineal
    ODS:
  • Goal 3: Health and well-being

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